Consumables and Repair Parts
Quick Cross-Reference
350D
Parts GuideE500
Extraction Electrode Analyzer Magnet Mirror Faraday/Setup Cup Dipole & Scanner Shroud, Flange, Source and Extraction Upgrades Source Flange and Shroud Optimized Source Body General Parts Guide Manipulator Motors and gears Manipulator High Serviceability Refurbishment9500 & 9500XR Parts
Parts guide Source Gas Feed Tubes End Stations Parts guide End Stations 200mm Moving clip Refurbishment3204, 3206, 6200
Source Source, Extraction, Magnet Chamber, Quadrapole Quadrapole Extraction Magnet Chambers6200 SKM
SourceNV20A
Source8200P
SourceGSD
Standard Mo Source Mo and W Source configurations, Vaporizers Analyzer Extraction Electrode Post Accel Post Accel Head, 2x Isolation V32, V33, V34, V34A* upgrade Plasma Shower Assembly with Enhanced Isolation 2X Dual Vaporizer Standard Dual Vaporizers Standard Single Vaporizers Single Vaporizers with Heat Shields 150mm, 200mm Wafer Guides End Reflector Robot Chuck Universal Upgrade Kit Universal Heavy Process Upgrade Kit Water cooled and non-water cooled Source and Liner Flange Enhancements V3 Bellows Flange and Shield Liner200
Parts Guide200 E2
Parts GuideELS, Eterna
Extended Life Source Arc Chamber Liner Systems Cathodes and Filaments Extraction Electrode Faraday FlagGas Abatement
Delatech Parts guideQuick Cross-Reference by Machine / Model
AMAT 9500 Glemco Cross AMAT Quantum Glemco Cross Axcelis 6200 Glemco Cross Axceils 8250 Glemco Cross Axcelis GSD Glemco Cross Axcelis HC3 Glemco Cross Axcelis HE3 Ultra Glemco Cross Axcelis nv10 Glemco Cross Novellus ALDCVD Altus Glemco Cross Novellus CVD C1, C2 Glemco Cross Novellus HDPCVD Speed Glemco Cross Varian AMAT 350D Glemco Cross Varian AMAT E500 Glemco Cross Varian AMAT Viision Glemco Cross Varian AMAT Viista Glemco Cross WJ Aviza APCVD Glemco CrossNot Your Average Aerospace Shop
Tungsten in Aerospace
How Are Tungsten Alloys Used in the Aerospace Industry? What Are Tungsten Alloys? Why Tungsten Alloys Are Important to the Aerospace IndustryTantalum in Aerospace
Tantalum Alloys: Enhancing Material Performance Aerospace Applications for Tantalum Alloys Recycling Tantalum: Sustainable SolutionsNickel in Aerospace
Tantalum Alloys: Enhancing Material Performance Aerospace Applications for Tantalum Alloys Nickel Alloys in AerospaceAluminum In Aerospace
Aluminum in Aircraft and Spacecraft Aluminum Grades for Aerospace Applications Benefits of Aluminum for Aerospace ApplicationsMo and W Source configurations, Vaporizers
Extraction Electrode Post Accel
Plasma Shower Assembly with Enhanced Isolation
Single Vaporizers with Heat Shields
Universal Heavy Process Upgrade Kit
Water cooled and non-water cooled
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