Engineering Solutions For Your Existing OEM Equipment
Products for Applied Materials, Axcelis,Varian/Genus, LAM, Novellus, Aviza/WJ
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| Glemco P/N | OEM No / Item Description | Click Image To Enlarge |
| 8A145 |
GASKET, SHIELDING (4 FT) 3320-01101 |
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| 90051 |
Retainer Pin Assembly
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| 90051-1 |
Retainer Pin0020-96040 0020-96040 |
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| 90052 |
Retainer, Front Plate
0020-98908
0020-98908 |
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| 90053G |
Front Plate Half, Graphite
0020-84219 Issue B |
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| 90053M |
Front Plate Half, Molybdenum (NOT a direct OEM replacement - See P/N 90053 for direct replacement.) 0020-85610 |
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| 90054 |
Liner, Side Plate, Tungsten
Side Vent Also see the following components: 90058, 90055, and 90060 0020-81362 |
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| 90054A |
Liner, Side Plate, Tungsten (Use With Vented End Liner System) 0020-98917 |
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| 90054M |
Side Plate Liner, Molybdenum (NOT a direct OEM replacement - See P/N 90054 for direct replacement.) 0020-98917 0020-98917 |
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| 90055 |
Filament End Plate Liner, Graphite Side Vent Version 0020-81364 |
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| 90055A |
0020-80180 FILAMENT END LINER, END VENT |
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| 90055M |
Filament End Linder Plate, Molybdenum (NOT a direct OEM replacement - See P/N 90055 for direct replacement.) 0020-81364 |
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| 90056 |
Filament Insert, Molybdenum 0020-98914 |
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| 90057 |
Filament
0020-82135 |
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| 90057B |
PIGTAIL FILAMENT 2.4 0020-82135 |
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| 90058 |
REPELLER END LINER PLATE 0020-81365 |
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| 90058A |
Repeller End Liner, End Vent, Graphite 0020-80181 |
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| 90058M |
Repeller End Liner Plate, Molybdenum (NOT a direct OEM replacement - See P/N 90058 for direct replacement.) 0020-81365 |
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| 90059 |
Anti-Cathode, Tungsten
0020-81482 |
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| 90059M |
Anti-Cathode, Molybdenum (NOT a direct OEM replacement - See P/N 90059 for direct replacement.) 0020-81482 |
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| 90060 |
Base Plate Liner, Tungsten
0020-81363 |
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| 90060A |
Liner, Base Plate, Tungsten
End Vent
End vent liner set:
90011, 90010, 90054A and 90060A 0020-98916 |
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| 90060M |
Base Plate Liner, Molybdenum (NOT a direct OEM replacement - See P/N 90060 for direct replacement.) 0020-98916 0020-98916 Not a direct OEM replacement |
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| 90061 |
Arc Chamber Assembly for SDS Includes: 1 each - 90061-1 2 each - 90061-2 1 each - 90061-3 |
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| 90061-1 |
Arc Chamber Body Also see P/N 90061 0020-81224 |
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| 90061-2 |
Plug, Arc Chamber Port Also see P/N 90061 |
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| 90061-3 |
Port, Arc Chamber Oven Also see P/N 90061 0020-81226 |
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| 90061A |
Arc Chamber Assembly, Ported For Vaporizer Only Includes: 1 each - 90061A-1 1 each - 90061-3 |
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| 90061A-1 |
BERNAS ARC CHAMBER 0020-81224 |
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| 90062 |
Anti-Cathode Ground Strap0020-98913 0020-84898 0020-98913 0020-84898 |
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| 90063 |
Filament Strap, Silver0020-98902 0020-82741 0020-82741 0020-98902 |
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| 90064 |
Positive Filament Clamp
0020-81521
0020-81521 |
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| 90065 |
Negative Filament Clamp
0040-94187 0040-94187 |
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| 90065-1 |
NEGATIVE FILAMENT CLAMP |
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| 90066 |
Filament Clamp Insert
0020-98580
0020-98580 |
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| 90067 |
Filament Clamp Screw
0020-98581 |
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| 90068 |
Clamp, Anti-Cathode0020-80070 0020-80070 |
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| 90069 |
Insulator Shield
0020-85362 0020-98904 0020-98904 0020-85362 |
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| 90070 |
Insulator w/ Helicoils 0020-97557 |
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| 90070A |
Insulator W/O Helicoils Also See P/N's 90070 and 90070B. 0020-97557 (no helicoils) 3420-90096 |
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| 90070B |
Insulator, Extended Life, W/O Helicoils Also See P/N's 90070 and 90070A. 0020-97557 |
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| 90071 |
MTG BLOCK ASSY, ANTI-CATH END 0020-98900 |
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| 90071-1 |
MTG BLOCK, ANTI-CATHODE END No OEM Number Available |
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| 90072 |
0020-98899 MOUNTING BLOCK ASSY 0020-98899 |
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| 90073 |
Post
0020-98915 0020-98915 |
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| 90074 |
Gas Feed Tube Assembly
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| 90074A |
Gas Feed Tube Assembly, .250 Dia. Tube Use with P/N 90061-3A No OEM Number Available |
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| 90074A-3 |
BENT TUBE No OEM Number Available |
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| 90075 |
Gas Feed Tube Adapter Assembly
0040-93337 |
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| 90076 |
Face Seal Washer
0020-96753 0020-96753 |
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| 90076TO |
Face Seal Washer, Torlon Not direct OEM replacement, see P/N 90076 0020-96753 0020-96753 |
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| 90077 |
Vaporizer Blankoff Plate, Aluminum
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| 90077A |
Vaporizer Blankoff Plate, SST
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| 90078 |
Manifold Assembly
0040-93532 |
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| 90080 |
Feed-Thru Bushing
0020-94844
0020-94844 |
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| 90082 |
Feed-Thru Stabilizer
0020-98631 0020-98631 |
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| 90083 |
Handle 0020-98907 |
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| 90084 |
Source Body
0040-94573 |
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| 90087 |
FACE PLATE 0020-98953 |
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| 90089 |
0040-99067 ARC CHAMBER, BAFFLE PLATE TYPE 0040-99067 |
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| 90090 |
ARC CHAMBER, VAP PORT MOD No OEM Number Available |
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| 90091 |
Screw Retainer
0020-98920 |
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| 90092 |
#2 Diode Assembly
0150-90835 0150-90835 |
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| 90093 |
#1 Diode Assembly
0150-90834 0150-90834 |
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| 90094 |
Thumb Screw
0020-98911
0020-98911 |
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| 90095 |
0020-80215 .073 DIAMETER FILAMENT CLAMP 0020-80215 |
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| 90096 |
0020-98959 .073 DIAMETER FILAMENT GUIDE 0020-98959 |
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| 90098 |
9500 Source Bushing 0040-92795 |
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| 90098R |
SOURCE BUSHING,
AMAT 9500,REFURBISHED, CUSTOMER SUPPLIED 0040-92795 |
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| 90098RF |
9500 Source Bushing, Refurbished
From Inventory, Please contact Sales
for Availability. 0040-92795 |
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| 90099 |
XR80 Source Bushing 0040-95979 0040-95999??? |
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| 90099RF |
XR80 Source Bushing, Refurbished 0040-95979 0040-95999 |
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| 90100 |
SOURCE BUSHING, 9000/9200 0030-90102 |
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| 90110 |
Insulator 0040-90740 |
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| 90113 |
MACOR STANDOFF W/ HELICOIL 0020-82035 |
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| 90114 |
Insulator 3420-90056 |
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| 90115 |
INSULATOR 3420-90019 |
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| 90116 |
Insulator3420-90045 |
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| 90117 |
FILAMENT INSERT 3420-90042 |
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| 90118 |
INSULATOR, FILAMENT INSERT 3420-90057 |
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| 90119 |
INSULATOR 3420-90018 |
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| 90120 |
Insulator, Filament Insert 3420-90046 |
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| 90122 |
ELECTRODE GROUND 0020-98787 |
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| 90124 |
Front Plate Half, Graphite 0020-84217 |
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| 90125 |
Post MRS Slit 25mm X 55mm Aperture Also see P/N 90260 for 25mm X 68mm aperture. 0020-97885 |
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| 90127 |
Shield, Source Chamber, Graphite
0020-82474 |
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| 90128 |
Beam Stop, Graphite 0020-82832 |
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| 90129 |
SOURCE BUSHING, 9200 SERIES 0030-90102 |
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| 90130 |
GROUND ELECTRODE 0020-83425 |
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| 90130A |
ELECTRODE, GROUND, REVERSABLE 0020-83425 |
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| 90131 |
ELECTRODE SUPPRESSION 0020-84523 |
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| 90131A |
ELECTRODE, SUPPRESSION, REVERSABLE 70358 |
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| 90132 |
GROUND ELECTRODE PLATE 0040-94202 |
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| 90132-1 |
NO OEM AVAILABLE GROUND ELECTRODE PLATE |
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| 90132-2 |
NO OEM NUMBER AVAILABLE SHIELD, INSULATOR |
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| 90133 |
SUPRESSION ELECTRODE PLATE 0040-93527 |
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| 90133-1 |
NO OEM AVAILABLE SUPPRESSION ELECTRODE PLATE |
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| 90133-2 |
NO OEM AVAILABLE |
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| 90134 |
SUPRESSION RING 0020-97546 |
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| 90135 |
SUPRESSION RING SPACER 3790-90104 |
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| 90148 |
Shoe, 150mm0040-95790 0040-95790 |
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| 90148-1 |
BASE, 150mm SHOE BLADE 0040-95790 |
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| 90148-2 |
TOP PLATE, 150mm SHOE BLADE 0040-95790 |
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| 90150 |
MOUNTING SUPPRESSION ELECTRODE 0020-83974 ISSUE D |
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| 90151 |
ELECTRODE SUPPRESSION 0020-86280 Issue B |
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| 90151A |
ELECTRODE, SUPPRESSION 0020-04207 |
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| 90151B |
ELECTRODE SUPPRESSION Slots are identical and the part has been designed to be reversible so that the life of this part can be doubled. See P/N's 90151 and 90151A for original OEM designs. Alternative to OEM #: 0020-04207 0020-86280 Issue B |
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| 90152 |
ELECTRODE, G2, ADJUSTABLE 0020-07388 ISSUE A 91678 EG |
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| 90153 |
GROUND ELECTRODE 0020-85090 Issue A 76403 EG |
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| 90154 |
BRACKET, GROUND ELECTRODE ASSY 0020-86640 Issue A |
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| 90155 |
Filament Guide
0020-87508 |
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| 90156 |
Filament
0020-86735 |
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| 90156C |
NO OEM AVAILABLE FILAMENT, 2% CERIATED |
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| 90156C |
NO OEM AVAILABLE FILAMENT, 2% CERIATED |
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| 90157 |
Standoff, Insulator
0020-86933 |
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| 90158 |
Cathode, Tungsten, Without Pin 0040-96830 |
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| 90158A |
CATHODE, SLOTTED 0040-47909 0041-05942 0020-47909 |
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| 90159 |
Anti-Cathode End Liner, Tungsten
0021-90404 |
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| 90159G |
Anti-Cathode End Liner, Graphite
0020-86740 |
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| 90160 |
Cathode End Liner, Tungsten
0021-90405 |
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| 90160G |
Cathode End Liner, Graphite
0020-89586 |
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| 90161 |
SUPPRESSION ELECTRODE BRACKET 0020-86641 |
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| 90161A |
BRACKET SUPPRESION ELECT ASSY 0021-90351 |
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| 90162 |
Face Plate Half, Right
0021-90787 |
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| 90162A |
FRONT PLATE, R/H, 550mm 0020-25516 |
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| 90163 |
Face Plate Half, Left
0021-90786 |
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| 90164 |
Retainer, Hook, Graphite
0021-90036 |
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| 90165 |
Insulator Shield, Boron 0021-90851 |
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| 90166 |
Arc Chamber, Graphite
0020-89990 |
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| 90167 |
Insulator, 50mm 0040-01445 |
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| 90168 |
Mounting Ground Electrode, Graphite For use with P/N's 90151, 90151A, and 90151B 0020-84522 ISSUE A |
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| 90170 |
Liner, Base, Tungsten
0020-86737 |
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| 90171 |
Liner, Side, Tungsten
0020-86738 |
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| 90172 |
PRE MRS SLIT 0020-85069 |
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| 90173 |
SMT INSULATOR 0021-90020 |
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| 90174 |
GUIDE TUBE SUPPORT 0020-8917 71697 0021-90311 |
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| 90175 |
INSULATOR RING 0021-90245 |
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| 90176 |
OUTER INSULATOR RING 0021-90953 |
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| 90177 |
OEM # NOT AVAILABLE. FRONT PLATE, ONE PIECE, 650MM |
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| 90177A |
NO OEM # AVAILABLE. FRONT PLATE, ONE PIECE, 550 MM,
GRAPHITE |
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| 90177AW |
NO OEM NUMBER FRONT PLATE, ONE PIECE, 550 MM,
TUNGSTEN |
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| 90178 |
0020-53134 FILAMENT CLAMP 0020-53134 |
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| 90179 |
0200-82164 LINER, BASE, ANTIMONY 0200-82164 |
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| 90198 |
POWER SUPPLY, DUAL 12-15V, 3A. 1140-01048 |
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| 90202 |
ARC CHAMBER |
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| 90210 |
ARC CHAMBER SIDE LINER |
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| 90213 |
FILAMENT INSERT |
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| 90215 |
FILAMENT / REPELLER INSULATOR No OEM Number Available |
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| 90217 |
COPPER STRAP |
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| 90224 |
REPELLER CLAMP CONNECTOR STRAP |
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| 90226 |
LEFT FILAMENT CLAMP STRAP |
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| 90227 |
RIGHT FILAMENT CLAMP STRAP |
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| 90228 |
MOUNTING BUTTON SHIM |
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| 90236 |
0020-98880 INSERT, DECEL ELECTRODE 0020-98880 |
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| 90251 |
PRE-MRS SLIT 0020-84988 |
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| 90251A |
PRE MRS SLIT 0020-83924 |
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| 90252 |
0020-98878 INNER INSERT 0020-98878 |
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| 90253 |
NEUTRAL INSERT 0020-98879 |
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| 90254 |
0020-98877 FLIGHT TUBE INSERT, OUTER 0020-98877 |
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| 90255 |
LINER CLAMP PLATE 0020-83172 |
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| 90256 |
0020-83227 SPACER, GRAPHITE 0020-83227 |
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| 90257A |
VANE, MRS 0020-82810 97827 (EG) 65522 (EG) |
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| 90257B |
*OBSOLETE - SEE 90257A* VANE, MRS 0020-81268 |
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| 90260 |
Post MRS Slit - 25mm X 68mm Aperture See P/N 90125 for 25mm X 55mm aperture. 0020-83925 Rev. A |
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| 90261 |
SUPPRESSION RING 0020-84055 |
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| 90263 |
Filament Clamp, Left
0020-86734 0020-86734 |
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| 90264 |
Filament Clamp, Right
0020-86733 0020-86733 |
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| 90265 |
Cathode Support Bar Assembly
0040-96352 |
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| 90266 |
0020-86731 FILAMENT STRAP 0020-86731 |
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| 90268 |
MOVING CLIP ASSEMBLY 9010-00024 |
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| 90269 |
SHIELD, COOLED TUBE 0020-04775 ISSUE A |
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| 90282R |
0040-39896 REV. P1 REFURB, HEATER PEDESTAL, 6" 0040-39896 REV-P1 0040-39896 REV P1 |
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| 90283R |
WxZ HEATER PEDESTAL REFURB. 0010-03331 (Refurb) |
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| 90285R |
0040-04542 REV. 001 HEATER PEDESTAL REFURBISHMENT 0040-04542 REV. 001 |
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| 90290-11 |
Mount Bracket, Left 0021-90361 |
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| 90290-12 |
RIGHT 0040-97998 |
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| 90290-9 |
Mount Plate, Top 0021-90362 |
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| 90291 |
RF Cover, Aluminum 0015-9089 Rev. E 0040-05132 |
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| 90310R |
HIGH VOLTAGE SOURCE BUSHING, AMAT XR80 9500, REFURBISHED 0040-51795 |
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| 90501 |
MOTOR SHIELD BRACKET 0020-03451 |
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| 90504 |
0015-20035 INSULATOR SCREW 0015-20035 |
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| 90507 |
DC BIAS PLUG No OEM Number Available |
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| 90510 |
PLASMA SHIELD No OEM Number Available |
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| 90520 |
TITANIUM PASTE DISK, DUMMY WAFER 0020-22813 |
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| 90550 |
Teos Perf Plate, 150mm
0020-10071 0020-10071 |
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| 90552 |
TEOS PERF PLATE, 200MM 0020-10117 |
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| 90560 |
Quartz Window, Round0020-09158 No OEM Number Available |
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| 90610 |
VAT Valve Guide
0021-18827 |
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| 90620 |
0020-98882 EXTRACTION ELECTRODE FOCUS 0020-98882 |
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| 90704 |
Pin, Wafer Lift, 6"0020-09035 0020-09035 |
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| 90750 |
PANEL SCREW 0020-42266-P2 |
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| 90751 |
INSULATOR BLCKWATER MANIFOLD, ULTIMA HDPCVD 0040-03485 |
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| 90752 |
SCREW, FLAT HEAD 0020-32060 |
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| 90753 |
WASHER NOZZLE ULTIMA HDPCVD 0020-18899 |
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| 90825 |
Filament, HDPFG Flood 0021-90017 |
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| 90875 |
APERTURE PLATE, 50% RED. 0021-90441 |
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| 90879 |
GUIDE TUBE 61388 |
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