Products For: Eaton/Axcelis
We have the following assemblies and components for the following Eaton/Axcelis semiconductor process implant equipment models:
Eaton/Axcelis Medium Current:
3204, 3206, 6200, NV8200, 8250, Optima
Eaton/Axcelis High Current:
NV10-80, NV10-160, NV20, GSD100, GSD200, GSD200E, GSD200EE, GSD HE and VHE, Ultra
- Sources
- Vaporizers
- Extraction electrodes
- Analyzer
- EMER
- Sources
- Plasma Shower
- Electron Shower
- Faraday Flag
- Resonator
- Electrostatic Quadrapole
- Beamline
- Resolving aperture