Glemco reconditions the following Novellus Concept 1 Heater Pedestals:
6" Heater Pedestal - P/N 96980R (OEM 02-045721-00) / (OEM 02-09268-00) / (OEM 02-09269-00)
8" Heater Pedestal - P/N 96981R (OEM 02-033134-00)
*Please call if the OEM number you have is not listed.*

• Vacuum chucking surface is reconditioned to a "like new" state and consistently matches or beats the original OEM's    clamping pressure of <3T.

• O-ring surfaces on the back-end are also reconditioned to provide reliable seals.

• Heater functionality is verified with a resistive heater check.

• Pedestals are packaged carefully to avoid any contact with the chuck surface, ensuring maximum surface quality at the   time of delivery to the customer.

Consider getting your used heater pedestals reconditioned to "like new" condition.
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Heater Pedestal Refurbishment